MEMS-SOI substrates
Advanced substrates offer higher precision, enhanced mechanical performance, and lower power consumption for high-performance sensors
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MEMS-SOI enhances sensor performance
Soitec's MEMS-SOI offers the benefits of higher precision, enhanced mechanical performance and lower power over traditional MEMS technologies to high performance sensors.
MEMS-SOI sensors benefit from improved sensitivity due to reduced electrical and mechanical noise, allowing sensors to detect smaller changes in the measured parameter more effectively.
The reduction in parasitic capacitances and the improved isolation provided by the SOI substrate can lead to faster response times for MEMS sensors. This means that sensors can react more quickly to changes in the measured parameter, which is crucial for dynamic applications.
How MEMS-SOI will impact your products
Higher precision and accuracy
SOI substrates offer a high degree of uniformity and precision in device fabrication, leading to more consistent and reliable MEMS devices. This is particularly important in applications requiring tight tolerances and high performance.
Enhanced mechanical performance
The SOI substrate provides a high-quality, low-stress silicon layer that improves the mechanical properties of MEMS devices. This can lead to better precision, higher resonant frequencies, and improved stability of MEMS structures.
Reduced power consumption
MEMS-SOI devices typically exhibit lower power consumption compared to traditional MEMS technologies. The reduced parasitic capacitance and efficient thermal management contribute to lower energy requirements, which is beneficial for battery-operated and portable applications.
Where MEMS-SOI technology is being used
MEMS-SOI enhances the user experience in AR/VR glasses and headsets by enabling chipsets to do real-time motion detection, precise head tracking, and eliminating image distortions for a more immersive experience.
MEMS-SOI enables accelerometers and gyroscopes that are used in airbag systems to detect rapid deceleration and activate airbags instantly during a collision. They also support stability control, traction control, and anti-lock braking systems (ABS) by monitoring vehicle dynamics.
MEMS-SOI enables sensing solutions that are present in devices we use everyday, such as smartphones, hearable and wearable, where they enable a variety of tasks such as image stabilization, user interfaces and power management.
MEMS-SOI enables accelerometers and vibration sensors to monitor equipment health by detecting early signs of wear, misalignment, or malfunction. This data enables predictive maintenance, reducing downtime and repair costs by addressing issues before they become critical.
Frequently asked questions
MEMS-SOI is commonly used in high performance sensors. These sensors can be found in a wide range of applications from Edge AI and IoT, Industrial, Automotive, Mobile and Consumer market segments.
MEMS-SOI provides the essential features to a high performance sensors in terms of higher accuracy, shorter response time, increased mechanical ruggedness and lower power consumption.
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