
FD-SOI is the mainstream product addressing a wide range of power sensitive markets. It is used for following technology nodes: 65, 28, 22, 12nm.
Major foundries using FD-SOI are Samsung, GLOBALFOUNDRIES, and STMicroelectronics.
It is the product line with the thinnest top and buried oxide layers.
Typical wafer characteristics:
- Top layer thickness: 120Å
- Top layer uniformity: +/-5Å
- Buried oxide layer: 150Å -300Å
- Available in 300mm